SPIE Proceedings [SPIE International Symposium on Instrumentation Science and Technology - Shenyang, China (Monday 15 September 2008)] Fifth International Symposium on Instrumentation Science and Technology - A diffraction grating scale for long range and nanometer resolution
Fan, Kuang-Chao, Tan, Jiubin, Wen, Xianfang, Li, Bai-Kun, Liu, Chi-HuiVolume:
7133
Year:
2008
Language:
english
DOI:
10.1117/12.815188
File:
PDF, 501 KB
english, 2008