SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Design for Manufacturability through Design-Process Integration IV - Process sizing aware flow for yield calculation
Yuan, Chi-Min, Rieger, Michael L., Thiele, JoergVolume:
7641
Year:
2010
Language:
english
DOI:
10.1117/12.846607
File:
PDF, 266 KB
english, 2010