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SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California (Saturday 22 January 2011)] MOEMS and Miniaturized Systems X - Fabrication and testing of MEMS-based optical filter combined with a HgCdTe detector
Kozak, Dmitry A., Schenk, Harald, Piyawattanametha, Wibool, Fernandez, Bautista, Morley, Michael L., Velicu, Silviu, Kubby, JoelVolume:
7930
Year:
2011
Language:
english
DOI:
10.1117/12.874345
File:
PDF, 958 KB
english, 2011