![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 21 January 2012)] Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V - High precision fabrication of polarization insensitive resonant subwavelength gratings
Boye, R. R., Peters, D. W., Wendt, J. R., Samora, S., Stevens, J., Shul, R. J., Hunker, J., Kellogg, R. A., Kemme, S. A., Schoenfeld, Winston V., Rumpf, Raymond C., von Freymann, GeorgVolume:
8249
Year:
2012
Language:
english
DOI:
10.1117/12.912169
File:
PDF, 5.44 MB
english, 2012