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SPIE Proceedings [SPIE Microlithography Conference - Santa Clara, CA (Monday 2 March 1987)] Electron-Beam, X-Ray, and Ion-Beam Lithographies VI - Transition Radiation As An X-Ray Source For Lithography
Piestrup, Melvin A., Moran, Michael J., Berman, Barry L., Pianetta, Piero, Seligson, Daniel, Blais, Phillip D.Volume:
773
Year:
1987
Language:
english
DOI:
10.1117/12.940351
File:
PDF, 4.91 MB
english, 1987