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SPIE Proceedings [SPIE Microlithography Conference - Santa Clara, CA (Monday 2 March 1987)] Electron-Beam, X-Ray, and Ion-Beam Lithographies VI - X-Ray Induced Damage In Boron Nitride, Silicon, And Silicon Nitride Lithography Masks
King, Paul, Pan, Lawrence, Pianetta, Piero, Shimkunas, Alex, Mauger, Philip, Seligson, Daniel, Blais, Phillip D.Volume:
773
Year:
1987
Language:
english
DOI:
10.1117/12.940362
File:
PDF, 255 KB
english, 1987