SPIE Proceedings [SPIE Microlithography Conference - Santa Clara, CA (Monday 2 March 1987)] Lasers in Microlithography - Quantification Of Laser Interference Fringes As Applied To Plasma Etch Endpoint Detection
Deaton, Russell, George, Allen, Batchelder, John S., Ehrlich, Daniel J., Tsao, Jeff Y.Volume:
774
Year:
1987
Language:
english
DOI:
10.1117/12.940402
File:
PDF, 266 KB
english, 1987