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SPIE Proceedings [SPIE 1985 Los Angeles Technical Symposium - Los Angeles (Monday 21 January 1985)] Advanced Applications of Ion Implantation - The Implantation Of MeV Er Into Si
Dietrich, H. B., Klein, P. B., Mrstik, B. J., Ingram, David C., Current, Michael I., Sadana, Devindra K.Volume:
530
Year:
1985
Language:
english
DOI:
10.1117/12.946487
File:
PDF, 451 KB
english, 1985