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SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Microelectronic Device and Multilevel Interconnection Technology - Integration of BaxSr1-xTiO3 thin film for DRAM application
Kashihara, Keiichiro, Okudaira, Tomonori, Tsunemine, Yoshikazu, Ohno, Yoshikazu, Itoh, Hiromi, Nishimura, Tadashi, Hirayama, Makoto, Horikawa, Tsuyoshi, Shibano, Teruo, Horie, Kazuo, Chen, Ih-Chin, DiVolume:
2636
Year:
1995
Language:
english
DOI:
10.1117/12.221125
File:
PDF, 713 KB
english, 1995