SPIE Proceedings [SPIE Asia Pacific Symposium on Microelectronics and MEMS - Gold Coast, Australia (Wednesday 27 October 1999)] Design, Characterization, and Packaging for MEMS and Microelectronics - Toward high-torque electrostatic tubular motors
Helin, Philippe, Bourbon, Gilles, Minotti, Patrice, Fujita, Hiroyuki, Courtois, Bernard, Demidenko, Serge N.Volume:
3893
Year:
1999
Language:
english
DOI:
10.1117/12.368443
File:
PDF, 4.71 MB
english, 1999