SPIE Proceedings [SPIE ECLIM 2002: 27th European conference...

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SPIE Proceedings [SPIE ECLIM 2002: 27th...

SPIE Proceedings [SPIE ECLIM 2002: 27th European conference on Laser Interaction with Matter - Moscow, Russian Federation (Monday 7 October 2002)] ECLIM 2002: 27th European Conference on Laser Interaction with Matter - Study of properties and preparation conditions of the plasmochemical SiO2 films

Izgorodin, V. M., Tolokonnikova, Yu. V., Aushev, A. A., Vasil'eva, A. I., Gogolev, V. G., Kovylov, A. F., Orlikova, E. G., Sevrugin, I. G., Krokhin, Oleg N., Gus'kov, Sergey Y., Merkul'ev, Yury A.

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Volume:

5228

Year:

2003

DOI:

10.1117/12.537457

File:

PDF, 244 KB

2003

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