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SPIE Proceedings [SPIE International Conference on Optical Instrumentation and Technology - Shanghai, China (Monday 19 October 2009)] 2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications - Design and simulation of tunable micromirror for two-color microbolometer
Zhou, Zhaoying, Gong, Yuguang, Li, Wei, Fukuda, Toshio, Seidel, Helmut, Cai, Haihong, Li, Zhi, Li, Xinxin, Zhang, Haixia, Chen, Chao, Jiang, Yadong, Cui, TianhongVolume:
7510
Year:
2009
Language:
english
DOI:
10.1117/12.837798
File:
PDF, 1.48 MB
english, 2009