Doping of 4H-SiC with Group IV Elements
Krieger, Michael, Rühl, Maximilian, Sledziewski, Tomasz, Ellrott, Gunter, Palm, Theresa, Weber, Heiko B., Bockstedte, MichelVolume:
858
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.858.301
Date:
May, 2016
File:
PDF, 358 KB
english, 2016