Effect of gas properties on the dynamics of the electrical...

Plasma Sources Science and Technology 2016 / 02 Vol. 25; Iss. 1

Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H 2 and CF 4

Bruneau, B, Lafleur, T, Gans, T, O’Connell, D, Greb, A, Korolov, I, Derzsi, A, Donkó, Z, Brandt, S, Schüngel, E, Schulze, J, Diomede, P, Economou, D J, Longo, S, Johnson, E, Booth, J-P
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Volume:
25
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/25/1/01LT02
Date:
February, 2016
File:
PDF, 1.13 MB
english, 2016
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