Monolithic-integrated piezoresistive MEMS accelerometer...

Microsystem Technologies 2017 / 5 Vol. 23; Iss. 5

Monolithic-integrated piezoresistive MEMS accelerometer pressure sensor with glass-silicon-glass sandwich structure

Dong, Jian, Long, Zhi-jian, Jiang, Heng, Sun, Li
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Volume:
23
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-016-2981-5
Date:
May, 2017
File:
PDF, 2.44 MB
english, 2017
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