Low flux and low energy helium ion implantation into...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2016 / 09 Vol. 383

Low flux and low energy helium ion implantation into tungsten using a dedicated plasma source

Pentecoste, Lucile, Thomann, Anne-Lise, Melhem, Amer, Caillard, Amael, Cuynet, Stéphane, Lecas, Thomas, Brault, Pascal, Desgardin, Pierre, Barthe, Marie-France
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Volume:
383
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2016.06.011
Date:
September, 2016
File:
PDF, 1.29 MB
english, 2016
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