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Nano-proximity direct ion beam writing
Seniutinas, Gediminas, Gervinskas, Gediminas, Anguita, Jose, Hakobyan, Davit, Brasselet, Etienne, Juodkazis, SauliusVolume:
2
Language:
english
Journal:
Nanofabrication
DOI:
10.1515/nanofab-2015-0006
Date:
January, 2016
File:
PDF, 2.23 MB
english, 2016