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Lithography: Resolution Limit in Plasmonic Lithography for...

Lithography: Resolution Limit in Plasmonic Lithography for Practical Applications beyond 2x-nm Half Pitch (Adv. Mater. 44/2012)

Kim, Seok, Jung, Howon, Kim, Yongwoo, Jang, Jinhee, Hahn, Jae W.
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Volume:
24
Journal:
Advanced Materials
DOI:
10.1002/adma.201290284
Date:
November, 2012
File:
PDF, 1.09 MB
2012
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