Hydrocarbon Incorporation Effect on the Electrical...

Hydrocarbon Incorporation Effect on the Electrical Properties of Low Dielectric Constant SiCOH Films Deposited with Tetrakis(trimethylsilyloxy)silane and Cyclohexane Precursors

Kim, Hoonbae, Kang, Wontak, Seo, Hyun-Jin, Jung, Donggeun, Boo, Jin-Hyo
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Volume:
36
Language:
english
Journal:
Bulletin of the Korean Chemical Society
DOI:
10.1002/bkcs.10544
Date:
November, 2015
File:
PDF, 365 KB
english, 2015
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