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Hydrocarbon Incorporation Effect on the Electrical Properties of Low Dielectric Constant SiCOH Films Deposited with Tetrakis(trimethylsilyloxy)silane and Cyclohexane Precursors
Kim, Hoonbae, Kang, Wontak, Seo, Hyun-Jin, Jung, Donggeun, Boo, Jin-HyoVolume:
36
Language:
english
Journal:
Bulletin of the Korean Chemical Society
DOI:
10.1002/bkcs.10544
Date:
November, 2015
File:
PDF, 365 KB
english, 2015