![](/img/cover-not-exists.png)
ChemInform Abstract: Material Characteristics of Spin-On Glasses for Interlayer Dielectric Applications.
PAI, P.-L., CHETTY, A., ROAT, R., COX, N., TING, C.Volume:
19
Journal:
ChemInform
DOI:
10.1002/chin.198809013
Date:
March, 1988
File:
PDF, 149 KB
1988