ChemInform Abstract: “Tailored” Organometallics as Precursors for the Chemical Vapor Deposition of High-Purity Palladium and Platinum Thin Films.
GOZUM, J. E., POLLINA, D. M., JENSEN, J. A., GIROLAMI, G. S.Volume:
19
Journal:
ChemInform
DOI:
10.1002/chin.198831272
Date:
August, 1988
File:
PDF, 124 KB
1988