![](/img/cover-not-exists.png)
ChemInform Abstract: Studies of the Gas-Phase Reactive Intermediates Formed by Heterogeneous Processes in Chlorosilane Chemical Vapor Deposition Using Photoelectron Spectroscopy and Mass Spectrometry.
KRUPPA, G. H., SHIN, S. K., BEAUCHAMP, J. L.Volume:
21
Journal:
ChemInform
DOI:
10.1002/chin.199014027
Date:
April, 1990
File:
PDF, 140 KB
1990