Experimental apparatus for investigation of sputtering and secondary ion emission induced by energetic ion beams
A. Drozdziel, K. Pyszniak, J. Sielanko, M. Turek, A. WójtowiczVolume:
20
Year:
2006
Language:
english
Pages:
5
DOI:
10.1002/rcm.2306
File:
PDF, 223 KB
english, 2006