Tunable Optical Properties of SiN...

Plasma Processes and Polymers 2016 / 02 Vol. 13; Iss. 2

Tunable Optical Properties of SiN x Thin Films by OES Monitoring in a Reactive RF Magnetron Plasma

Pana, Iulian, Vitelaru, Catalin, Zoita, Nicolae Catalin, Braic, Mariana
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Volume:
13
Language:
english
Journal:
Plasma Processes and Polymers
DOI:
10.1002/ppap.201400202
Date:
February, 2016
File:
PDF, 1.58 MB
english, 2016
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