Modulating Low Energy Ion Plasma Fluxes for the Growth of...

Plasma Processes and Polymers 2015 / 08 Vol. 12; Iss. 8

Modulating Low Energy Ion Plasma Fluxes for the Growth of Nanoporous Thin Films

Alvarez, Rafael, Lopez-Santos, Carmen, Ferrer, Francisco J., Rico, Victor, Cotrino, José, Gonzalez-Elipe, Agustín R., Palmero, Alberto
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Volume:
12
Language:
english
Journal:
Plasma Processes and Polymers
DOI:
10.1002/ppap.201400209
Date:
August, 2015
File:
PDF, 984 KB
english, 2015
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