Deposition temperature dependence of titanium oxide thin...

phys stat sol (a) 2013 / 02 Vol. 210; Iss. 2

Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition

Lee, Jaesang, Lee, Seung Jae, Han, Won Bae, Jeon, Heeyoung, Park, Jingyu, Jang, Woochool, Yoon, Chong Seung, Jeon, Hyeongtag
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Volume:
210
Language:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201228671
Date:
February, 2013
File:
PDF, 1.48 MB
english, 2013
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