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Neutron-irradiation effect on the electrical characteristics of amorphous silicon carbide and nitrogen-doped silicon carbide films prepared by PECVD technology
Huran, Jozef, Boháček, Pavol, Shvetsov, Valery N., Kobzev, Alexander P., Kleinová, Angela, Borzakov, Sergey B., Hrubčín, Ladislav, Sekáčová, Mária, Balalykin, Nikolay I.Volume:
210
Language:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201330248
Date:
December, 2013
File:
PDF, 570 KB
english, 2013