Ion bombardment measurements and simulations of a low temperature VHF PECVD SiH 4 -H 2 discharge in the a-Si:H to μc-Si:H transition regime
Landheer, Kees, Goedheer, Wim J., Poulios, Ioannis, Schropp, Ruud E. I., Rath, Jatindra K.Language:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201532917
Date:
March, 2016
File:
PDF, 1.14 MB
english, 2016