Thermal decomposition of tungsten hexacarbonyl: CVD of...

Physica status solidi 2015 / 07 Vol. 12; Iss. 7

Thermal decomposition of tungsten hexacarbonyl: CVD of W-containing films under Pd codeposition and VUV assistance

Krisyuk, Vladislav V., Koretskaya, Tatyana P., Turgambaeva, Asiya E., Trubin, Sergey V., Korolkov, Ilya V., Debieu, Olivier, Duguet, Thomas, Igumenov, Igor K., Vahlas, Constantin
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Volume:
12
Language:
english
Journal:
physica status solidi (c)
DOI:
10.1002/pssc.201510020
Date:
July, 2015
File:
PDF, 450 KB
english, 2015
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