Thermal recovery process of electron irradiated Si...

Physica status solidi 2015 / 12 Vol. 12; Iss. 12

Thermal recovery process of electron irradiated Si 1-x C x source/drain n-MOSFETs

Takakura, Kenichiro, Hori, Masato, Yoneoka, Masashi, Tsunoda, Isao, Nakashima, Toshiyuki, Simoen, Eddy, Claeys, Cor
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Volume:
12
Language:
english
Journal:
physica status solidi (c)
DOI:
10.1002/pssc.201510088
Date:
December, 2015
File:
PDF, 343 KB
english, 2015
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