Selective functionalization of silicon surface controlled...

Surface and Interface Analysis 2014 / 12 Vol. 46; Iss. 12-13

Selective functionalization of silicon surface controlled by metastable helium atom beam for patterning chemisorbed monolayer molecular assemblies

Wang, Z. P., Zhang, J. W., Zhang, Z. M., Ding, Z. J., Yamauchi, Y.
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Volume:
46
Language:
english
Journal:
Surface and Interface Analysis
DOI:
10.1002/sia.5598
Date:
December, 2014
File:
PDF, 774 KB
english, 2014
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