Compositional non-uniformity in a sputter-deposited...

Philosophical Magazine B 1989 / 12 Vol. 60; Iss. 6

Compositional non-uniformity in a sputter-deposited amorphous Al–Ta alloy

Shimizu, K., Thompson, G. E., Wood, G. C., Kurima, Y., Kobayashi, K., Yoshioka, H., Asami, K., Kawashima, A., Hashimoto, K.
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Volume:
60
Language:
english
Journal:
Philosophical Magazine Part B
DOI:
10.1080/13642818908209752
Date:
December, 1989
File:
PDF, 530 KB
english, 1989
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