High-performance p-channel LTPS-TFT using HfO...

Semiconductor Science and Technology 2009 / 07 Vol. 24; Iss. 7

High-performance p-channel LTPS-TFT using HfO 2 gate dielectric and nitrogen ion implantation

Ma, Ming-Wen, Chiang, Tsung-Yu, Chao, Tien-Sheng, Lei, Tan-Fu
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
24
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/24/7/072001
Date:
July, 2009
File:
PDF, 197 KB
english, 2009
Conversion to is in progress
Conversion to is failed