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Observation of a carbon-based protective layer on the sidewalls of boron doped ultrananocrystalline diamond-based MEMS during in situ tribotests
Buja, Federico, Kokorian, Jaap, Gulotty, Richard, Sumant, Anirudha V, Merlijn van Spengen, WVolume:
25
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/25/12/125020
Date:
December, 2015
File:
PDF, 2.96 MB
english, 2015