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Adjustable plane mirror interferometer adapted for microelectronic mask with different thickness
Yan, Juqun, Lin, Dejiao, Liu, Zhongyao, Yin, Chunyong, Hou, WenmeiVolume:
13
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/13/1/095
Date:
January, 2005
File:
PDF, 358 KB
english, 2005