Features of silicon-containing coatings deposition from ablation plasma formed by a powerful ion beam
Sazonov, R, Kholodnaya, G, Ponomarev, D, Remnev, G, Khailov, IVolume:
552
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/552/1/012025
Date:
November, 2014
File:
PDF, 1.13 MB
english, 2014