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DRIE process optimization to fabricate vertical silicon nanowires using gold nanoparticles as masks
Bui, Thanh Tung, Tu, Hoan Phuc, Dang, Mau ChienVolume:
6
Language:
english
Journal:
Advances in Natural Sciences: Nanoscience and Nanotechnology
DOI:
10.1088/2043-6262/6/4/045016
Date:
December, 2015
File:
PDF, 3.37 MB
english, 2015