Pulsed plasma-enhanced chemical vapor deposition from...

Journal of Applied Polymer Science 1998 Vol. 67; Iss. 8

Pulsed plasma-enhanced chemical vapor deposition from hexafluoropropylene oxide: Film composition study

Scott J. Limb, David J. Edell, Edward F. Gleason, Karen K. Gleason
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Volume:
67
Year:
1998
Language:
english
Pages:
14
DOI:
10.1002/(sici)1097-4628(19980222)67:83.0.co;2-x
File:
PDF, 296 KB
english, 1998
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