Wavelength selection for multilayer coatings for...

Journal of Micro/Nanolithography MEMS and MOEMS 2012 / 10 Vol. 11; Iss. 4

Wavelength selection for multilayer coatings for lithography generation beyond extreme ultraviolet

Makhotkin, Igor A., Zoethout, Erwin, Louis, Eric, Yakunin, Andrei M., Müllender, Stephan, Bijkerk, Fred
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Volume:
11
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.jmm.11.4.040501
Date:
October, 2012
File:
PDF, 715 KB
english, 2012
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