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SPIE Proceedings [SPIE Micro92 - San Jose, CA (Monday 9 March 1992)] Optical/Laser Microlithography V - Novel 0.2-μm i-line lithography using phase-shifting on the substrate
Tabuchi, Hiroki, Taniguchi, Takayuki, Moriwaki, Hiroyuki, Tanigawa, Makoto, Uda, Keichiro, Sakiyama, Keizo, Cuthbert, John D.Volume:
1674
Year:
1992
Language:
english
DOI:
10.1117/12.130359
File:
PDF, 2.33 MB
english, 1992