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SPIE Proceedings [SPIE Microelectronic Processing '92 - San Jose, CA (Sunday 20 September 1992)] Microelectronics Manufacturing and Reliability - Investigation into bake-reversible low-level ESD-induced leakage
Dickson, Nicholas, Miller, James W., Jackson, Mark, Kohn, Stella, Pyle, Ronald E., Tatti, Sudhindra, Vasquez, Barbara, Sabnis, Anant G., MacWilliams, Kenneth P., Woo, Jason C.Volume:
1802
Year:
1993
Language:
english
DOI:
10.1117/12.139346
File:
PDF, 566 KB
english, 1993