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SPIE Proceedings [SPIE Applications in Optical Science and Engineering - Boston, MA (Sunday 15 November 1992)] Industrial Applications of Optical Inspection, Metrology, and Sensing - Supersmooth surface profile on-line testing
Tu, Dawei, Zhuo, Yongmo, Lu, Zukang, Brown, Gordon M., Harding, Kevin G., Stahl, H. PhilipVolume:
1821
Year:
1993
Language:
english
DOI:
10.1117/12.145567
File:
PDF, 390 KB
english, 1993