SPIE Proceedings [SPIE 13th Annual BACUS Symposium on...

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SPIE Proceedings [SPIE 13th Annual BACUS Symposium on Photomask Technology and Management - Santa Clara, CA (Wednesday 22 September 1993)] 13th Annual BACUS Symposium on Photomask Technology and Management - Masks for Markle-Dyson optics

Grenville, Andrew, Owen, Gerry, Robinson, Jeff A., Borkholder, David A., Frank, Curtis W., Pease, Roger Fabian W., Markle, David A., Grady, Edward C., Moneta, Jack P.
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Volume:
2087
Year:
1994
Language:
english
DOI:
10.1117/12.167246
File:
PDF, 532 KB
english, 1994
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