SPIE Proceedings [SPIE Microelectronic Processing '93 - Monterey, CA (Sunday 26 September 1993)] Microelectronic Processes, Sensors, and Controls - Ultrashallow p+-n junctions formed by diffusion from an RTCVD-deposited B:Ge layer
Park, Byung G., King, Clifford A., Eaglesham, David J., Sorsch, T. W., Weir, B., Luftman, H. S., Bokor, Jeffrey, Kim, Y. O., Bondur, James A., Elliott, Kiefer, Hauser, John R., Kwong, Dim-Lee, Ray, AsVolume:
2091
Year:
1994
Language:
english
DOI:
10.1117/12.167333
File:
PDF, 601 KB
english, 1994
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