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SPIE Proceedings [SPIE International Symposium on Precision Engineering Measurement and Instrumentation 2012 - Chengdu, China (Wednesday 8 August 2012)] Eighth International Symposium on Precision Engineering Measurement and Instrumentation - Reduction of measurement errors with two-channel configuration in the Mueller matrix ellipsometer
Li, Weiqi, Liu, Shiyuan, Zhang, Chuanwei, Chen, Xiuguo, Lin, JieVolume:
8759
Year:
2013
Language:
english
DOI:
10.1117/12.2014581
File:
PDF, 369 KB
english, 2013