SPIE Proceedings [SPIE 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014) - Harbin, China (Saturday 26 April 2014)] 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems - Analysis and optimization of a novel laterally deformable optical NEMS grating transducer