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SPIE Proceedings [SPIE SPIE Scanning Microscopies - Monterey, California, United States (Tuesday 16 September 2014)] Scanning Microscopies 2014 - Assessing the viability of multi-electron beam wafer inspection for sub-20nm defects
Postek, Michael T., Newbury, Dale E., Platek, S. Frank, Maugel, Tim K., Thiel, Brad, Lercel, Michael, Bunday, Benjamin, Malloy, MattVolume:
9236
Year:
2014
Language:
english
DOI:
10.1117/12.2069302
File:
PDF, 464 KB
english, 2014