SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III - Polymer waveguide-based 1-GHz clock signal distribution system
Li, Ting, Tang, Suning, Li, Feiming, Dubinovsky, Michael, Wu, Linghui, Wickman, Randy W., Chen, Ray T., DeBusk, Damon K., Chen, Ray T.Volume:
2877
Year:
1996
Language:
english
DOI:
10.1117/12.250924
File:
PDF, 417 KB
english, 1996