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SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Microelectronic Structures and MEMS for Optical Processing II - Tradeoffs in MEMS materials
Cabuz, Cleopatra, Motamedi, M. Edward, Bailey, WayneVolume:
2881
Year:
1996
Language:
english
DOI:
10.1117/12.251245
File:
PDF, 296 KB
english, 1996