SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Wednesday 1 October 1997)] Microelectronic Device Technology - Methods for the design of microelectronic devices and process flows for manufacturability
Saxena, Sharad, Burch, Richard, Mozumder, P. K., Vasanth, Karthik, Rao, Suraj, Davis, Joe, Fernando, Chenjing, Rodder, Mark, Tsuchiya, Toshiaki, Burnett, David, Wristers, DirkVolume:
3212
Year:
1997
Language:
english
DOI:
10.1117/12.284600
File:
PDF, 146 KB
english, 1997